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Home » Product » Orbotech Paragon 8000 LDI Solution

Orbotech Paragon 8000 LDI Solution

Description

We supply both 8000Hi and 8000Hm models!

  • No mask which minimizes time and complexity
  • Registration accuracy of 20μm for inner layers
  • ±10μm annular ring accuracy
  • Individual panel scaling to factor in distortion
  • User feedback to improve results
  • Partial scaling
  • Seamless automation for ease-of-use and convenince
  • Depth of Focus±300μm for challenging topography problems
  • Rigid-flex single scan
  • Traceability: Machine ID, scaling stamp, serial number stamp, date and time stamps
  • High quality imaging with LDI and conventional resists
  • UV range 355nm
  • MAX substrate: 25″ x 32″ / 635 x 812mm
  • MIN exposure: 24″ x 32″ / 609 x 812mm
  • Substrate thickness: .001″ – .315″ / .025 – 8mm
  • 4000/8000 dpi, 5/2.5μm
  • 84-160 throughput 8mJ/cm2 photoresist
  • 42 throughput 50mJ/cm2 photoresist
  • 4W