Orbotech Paragon 9800 LDI Solution

Description

We supply both 9800Hi and 9800Hm models!

• No mask which minimizes time and complexity
• Registration accuracy of 20μm for inner layers
• ±10μm annular ring accuracy
• Individual panel scaling to factor in distortion
• User feedback to improve results
• Partial scaling
• Seamless automation for ease-of-use and convenince
• Depth of Focus±300μm for challenging topography problems
• Rigid-flex single scan
• Traceability: Machine ID, scaling stamp, serial number stamp, date and time stamps
• High quality imaging with LDI and conventional resists
• UV range 355nm
• MAX substrate: 25″ x 32″ / 635 x 812mm
• MIN exposure: 24″ x 32″ / 609 x 812mm
• Substrate thickness: .001″ – .315″ / .025 – 8mm
• 8000 dpi, 2.5μm
• 160/132 throughput 8mJ/cm2 photoresist
• 125 throughput 50mJ/cm2 photoresist
• 16W